SEAL INSPECTION DEVICE AND SEAL INSPECTION METHOD

A seal inspection device includes: a first holder including a port surrounded by an inspection target, and a through hole connected to an outside-leak detection flow path; a second holder holding the inspection target between the first and second holders; an inspection-place sealing portion forming,...

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Bibliographische Detailangaben
Hauptverfasser:	KASAI, Yuta, SAKURAI, Takayuki, KARUBE, Shotaro, TADANO, Hikaru, TAKEKOSHI, Masashi
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY MEASURING PHYSICS PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	A seal inspection device includes: a first holder including a port surrounded by an inspection target, and a through hole connected to an outside-leak detection flow path; a second holder holding the inspection target between the first and second holders; an inspection-place sealing portion forming, into a closed space, a space where the inspection target is arranged, in cooperation with the first and second holders; a pressurization valve connecting the port to both a supply source of an inspection gas and an exhaust system; a detector for the inspection gas; a first measurement valve connecting the detector to the port; and a second measurement valve connecting the outside-leak detection flow path to the detector.