SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF

A substrate processing apparatus includes a substrate support unit including a chuck for supporting a substrate, a fluid supply unit that supplies a processing fluid to the substrate, and a recovery unit surrounding the chuck and recovering the supplied processing fluid. The substrate support unit i...

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Bibliographische Detailangaben
Hauptverfasser:	KWON, Bo Ram, JANG, Sung Ho, LEE, Sung Lin, RYU, Dong Yol, KIM, Chul Woo
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	A substrate processing apparatus includes a substrate support unit including a chuck for supporting a substrate, a fluid supply unit that supplies a processing fluid to the substrate, and a recovery unit surrounding the chuck and recovering the supplied processing fluid. The substrate support unit includes an antistatic material in which milled carbon fibers (MCF) are blended into a perfluoroalkoxy alkane (PFA) resin.