Photoresist Remover

Cleaning compositions and the method of using the same are disclosed, where the compositions include one or more alkanolamines, one or more ether alcohol solvents or aromatic containing alcohol, one or more corrosion inhibitors, and optionally one or more secondary solvents.

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Bibliographische Detailangaben
Hauptverfasser: CAO, YUANMEI, PHENIS, MICHAEL, SUN, LAISHENG, WU, AIPING, WANG, LILI
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Cleaning compositions and the method of using the same are disclosed, where the compositions include one or more alkanolamines, one or more ether alcohol solvents or aromatic containing alcohol, one or more corrosion inhibitors, and optionally one or more secondary solvents.