VACUUM PUMP
A vacuum pump comprises: a rotor cylindrical portion; a motor configured to rotate the rotor cylindrical portion; a stator cylindrical portion, the rotor cylindrical portion and the stator cylindrical portion together forming a screw groove pump; a base housing the rotor cylindrical portion and the...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A vacuum pump comprises: a rotor cylindrical portion; a motor configured to rotate the rotor cylindrical portion; a stator cylindrical portion, the rotor cylindrical portion and the stator cylindrical portion together forming a screw groove pump; a base housing the rotor cylindrical portion and the stator cylindrical portion; a heater configured to heat the base or the stator cylindrical portion; a cooling device attached to the base; and a cover member arranged at an outer peripheral side of the stator cylindrical portion and an outer peripheral side of the base, covering the base through an air insulating layer, and contacting the cooling device. |
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