VACUUM PUMP
A vacuum pump comprises: a rotor having multiple stages of rotor blades and a rotor cylindrical portion; a stator having multiple stages of stator blades and a stator cylindrical portion; a base housing the rotor and the stator; and a cover member configured to cover an inner wall portion of the bas...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | A vacuum pump comprises: a rotor having multiple stages of rotor blades and a rotor cylindrical portion; a stator having multiple stages of stator blades and a stator cylindrical portion; a base housing the rotor and the stator; and a cover member configured to cover an inner wall portion of the base forming an internal space positioned on a gas-discharge downstream side with respect to gas-discharge-downstream-side end portions of the rotor cylindrical portion and the stator cylindrical portion. An inner peripheral side end of the cover member extends from the internal space to a position overlapping with an inner peripheral surface of the rotor cylindrical portion. |
|---|