METHOD FOR DIVIDING COMPOSITE MATERIAL

A method is disclosed for dividing a composite material in which a brittle material layer and a resin layer are laminated, including: a resin removing step of irradiating the resin layer with a laser beam oscillated from a first laser source along a scheduled dividing line of the composite material...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Hirata, Satoshi, Nakai, Kota, Matsuo, Naoyuki, Kanno, Toshihiro
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A method is disclosed for dividing a composite material in which a brittle material layer and a resin layer are laminated, including: a resin removing step of irradiating the resin layer with a laser beam oscillated from a first laser source along a scheduled dividing line of the composite material to form a processing groove along the scheduled dividing line; a brittle material removing step of irradiating the brittle material layer with a laser beam oscillated from an ultrashort pulsed laser source along the scheduled dividing line to form a processing mark along the scheduled dividing line; and a brittle material layer dividing step of generating thermal stress in the brittle material layer by irradiating the brittle material layer with a laser beam oscillated from a second laser source from the opposite side to the resin layer to thereby divide the brittle material layer.