SEMICONDUCTOR MEMORY DEVICE

According to one embodiment, a semiconductor memory device includes: a first semiconductor extending in a first direction parallel to a substrate; a first conductor extending in a second direction perpendicular to the first direction; a first charge storage layer surrounding the first conductor; a f...

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Bibliographische Detailangaben
1. Verfasser: MATSUO, Kouji
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:According to one embodiment, a semiconductor memory device includes: a first semiconductor extending in a first direction parallel to a substrate; a first conductor extending in a second direction perpendicular to the first direction; a first charge storage layer surrounding the first conductor; a first insulator provided between the first conductor and the first charge storage layer; a second insulator provided between the first charge storage layer and the first semiconductor, wherein an outer circumference of a portion of the second insulator is in contact with the first semiconductor; and a first memory cell including the first conductor, the first semiconductor, a portion of the first charge storage layer, a portion of the first insulator, and the portion of the second insulator.