BARRIER STRUCTURE WITH PASSAGE FOR WAVEGUIDE IN PHOTONIC INTEGRATED CIRCUIT

BARRIER STRUCTURE WITH PASSAGE FOR WAVEGUIDE IN PHOTONIC INTEGRATED CIRCUIT

Embodiments of the disclosure provide a photonic integrated circuit (PIC) structure with a passage for a waveguide through a barrier structure. The PIC structure includes a barrier structure on a substrate, having a first sidewall and a second sidewall opposite the first sidewall. A passage is withi...

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Bibliographische Detailangaben
Hauptverfasser: Polomoff, Nicholas A, Ellis-Monaghan, John J, Kuechenmeister, Frank G, Cho, Jae Kyu, Rakowski, Michal
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Embodiments of the disclosure provide a photonic integrated circuit (PIC) structure with a passage for a waveguide through a barrier structure. The PIC structure includes a barrier structure on a substrate, having a first sidewall and a second sidewall opposite the first sidewall. A passage is within the barrier structure, and extends from a first end at the first sidewall of the barrier structure to a second end at the second sidewall of the barrier structure. A shape of the passage includes a reversal segment between the first end and the second end. A waveguide within the passage and extends from the first end to the second end of the barrier structure.