SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD

A semiconductor manufacturing apparatus includes a transfer device that includes a transfer blade whose mounting area on which a wafer is mounted is defined on a front surface and a transfer arm adjusting a position of the transfer blade, and a processing chamber that accommodates the transfer blade...

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Bibliographische Detailangaben
1. Verfasser:	KAWASAKI, Daichi
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CLEANING CLEANING IN GENERAL CONVEYING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A semiconductor manufacturing apparatus includes a transfer device that includes a transfer blade whose mounting area on which a wafer is mounted is defined on a front surface and a transfer arm adjusting a position of the transfer blade, and a processing chamber that accommodates the transfer blade and is for removing foreign matter adhering to the mounting area.