CONTACT FORCE SENSOR AND DEVICE PROVIDED WITH CONTACT FORCE SENSOR

Provided are: a contact force sensor which has high accuracy and sensitivity and is capable of ensuring strength; and a device provided with the contact force sensor. The present invention comprises: a sensor body (2) manufactured by processing a semiconductor material, wherein the sensor body (2) i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ORITO, Manabu, TABATA, Yutaro, MATSUDATE, Tadashi
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	Provided are: a contact force sensor which has high accuracy and sensitivity and is capable of ensuring strength; and a device provided with the contact force sensor. The present invention comprises: a sensor body (2) manufactured by processing a semiconductor material, wherein the sensor body (2) is provided with: a ring-shaped portion (21); a central portion (22) formed substantially in the center of the ring-shaped portion (21); a spoke portion (23) connected to the ring-shaped portion (21) from the central portion (22) toward the outside; and stress-electricity conversion elements (5) which are disposed at positions facing each other on the front side and the back side of the spoke portion (23), and convert the displacement of the spoke portion (23) into an electric signal.