MIRROR CALIBRATION OF MULTIPLE FLOW-MEASUREMENT DEVICES

Various embodiments include an exemplary apparatus and method for insitu calibration of multiple flow-sensing devices within a dilution system. In one example, a calibration and dilution system includes a first mass-flow device to serve as a global reference, a second mass-flow device configured to be coupled to and provide a supply of clean gas to a primary diluter, and a third mass-flow device configured to be coupled to and provide a supply of clean gas to a secondary diluter, where the diluters are pneumatically coupled to one another through a gas-supply line. Multiple valves are coupled to at least the mass-flow devices and the diluters. The calibration and dilution system is arranged so that the mass-flow controllers can be calibrated in-situ without having to remove any of the mass-flow controllers from the calibration and dilution system. Other apparatuses, designs, and methods are disclosed.