FOCUS-LESS INSPECTION APPARATUS AND METHOD

An inspection apparatus may include: a structured-light source configured to sequentially radiate a plurality of structured lights having one phase range; a lens configured to adjust, for each of the plurality of structured lights, optical paths of light beams corresponding to phases of the phase ra...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HONG, Deok Hwa, JO, Eun Ha, LEE, Chan Kwon, JEON, Moon Young, HUR, Jung
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An inspection apparatus may include: a structured-light source configured to sequentially radiate a plurality of structured lights having one phase range; a lens configured to adjust, for each of the plurality of structured lights, optical paths of light beams corresponding to phases of the phase range such that a light beam corresponding to one phase of the phase range arrives at each point of a partial region on an object; an image sensor configured to capture a plurality of reflected lights generated by the structured lights being reflected from the partial region; and a processor configured to acquire a light quantity value of the reflected lights; and derive an angle of the surface by deriving phase values of the reflected lights based on the light quantity value for the reflected lights.