AGING COMPENSATION OF A FERROELECTRIC PIEZOELECTRIC SHOCK SENSOR

A method includes measuring a temperature of a semiconductor die, in which the semiconductor die includes a piezoelectric device, a pyroelectric device, and a memory. The method further includes receiving a first signal from the pyroelectric device, and based on the first signal, determining a param...

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Bibliographische Detailangaben
Hauptverfasser: SUMMERFELT, Scott Robert, COOK, Benjamin Stassen
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method includes measuring a temperature of a semiconductor die, in which the semiconductor die includes a piezoelectric device, a pyroelectric device, and a memory. The method further includes receiving a first signal from the pyroelectric device, and based on the first signal, determining a parameter to be combined with a second signal from the piezoelectric device. The method further includes storing the parameter and the measured temperature into the memory.