CHAMBER COMPONENT CLEANLINESS MEASUREMENT SYSTEM

An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where t...

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Bibliographische Detailangaben
Hauptverfasser:	BAYLON, Kennet Cresencio, AVOYAN, Armen, HUNDI, Girish M, YASSERI, Amir A, OUTKA, Duane, LA CROIX, Cliff, DAUGHERTY, John
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PERFORMING OPERATIONS PHYSICS PREVENTION OF FOULING IN GENERAL TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid.