PROCESSING APPARATUS AND PROCESSING METHOD

A processing apparatus configured to process a processing target object includes a holder configured to hold the processing target object; a holder moving mechanism configured to move the holder in a horizontal direction; a modifying device configured to radiate laser light to an inside of the proce...

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Bibliographische Detailangaben
Hauptverfasser: YAMASHITA, Yohei, MORI, Hirotoshi, TANOUE, Hayato, YAMAWAKI, Yohei
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A processing apparatus configured to process a processing target object includes a holder configured to hold the processing target object; a holder moving mechanism configured to move the holder in a horizontal direction; a modifying device configured to radiate laser light to an inside of the processing target object to form multiple internal modification layers in a spiral shape; a modifying device moving mechanism configured to move the modifying device in the horizontal direction; and a controller configured to control an operation of forming the internal modification layers. The controller controls operations of the holder and the modifying device such that a spiral processing movement according to the formation of the internal modification layers and an eccentricity follow-up movement of correcting an eccentric amount between the holder and the processing target object held by the holder are shared by the holder and the modifying device.