Reflectometer, spectrophotometer, ellipsometer and polarimeter systems including a wavelength modifier

Reflectometer, spectrophotometer, ellipsometer and polarimeter systems including a wavelength modifier

Ellipsometer, polarimeter, reflectometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.

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Bibliographische Detailangaben
Hauptverfasser: He, Ping, Schoeche, Stefan, Welch, James D, Meyer, Duane E, Van Derslice, Jeremy A, Guenther, Brian D, Liphardt, Martin M, Hale, Jeffrey S, Herzinger, Craig M
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:Ellipsometer, polarimeter, reflectometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.