METHOD FOR PRODUCING LIQUID CONTAINING SUBLIMABLE SUBSTANCE, SUBSTRATE DRYING METHOD, AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR PRODUCING LIQUID CONTAINING SUBLIMABLE SUBSTANCE, SUBSTRATE DRYING METHOD, AND SUBSTRATE PROCESSING APPARATUS

A sublimable substance is selected on the basis of whether the surface of a pattern is hydrophilic or hydrophobic. In cases where the surface of a pattern is hydrophilic, a solvent for hydrophilic cases is selected, said solvent having lower solubility in water than the selected sublimable substance...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OTSUJI, Masayuki, FUJIWARA, Naozumi, SASAKI, Yuta
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A sublimable substance is selected on the basis of whether the surface of a pattern is hydrophilic or hydrophobic. In cases where the surface of a pattern is hydrophilic, a solvent for hydrophilic cases is selected, said solvent having lower solubility in water than the selected sublimable substance; and in cases where the surface of a pattern is hydrophobic, a solvent for hydrophobic cases is selected, said solvent having lower solubility in oils than the selected sublimable substance. The selected sublimable substance is dissolved in the selected solvent.