PROCESS FOR PURIFIYING SILICON COMPOUNDS

A process for removing metallic impurities from halogenated silicon compounds, such as chlorosilane monomers and/or chlorinated polysilanes is disclosed. The process involves treating a halogenated silicon compound with a tertiary amine and thereafter a suitable grade of activated carbon.

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Bibliographische Detailangaben
Hauptverfasser: Depierro, Michael, Panah, Reza Hagh, Ketola, Barry
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A process for removing metallic impurities from halogenated silicon compounds, such as chlorosilane monomers and/or chlorinated polysilanes is disclosed. The process involves treating a halogenated silicon compound with a tertiary amine and thereafter a suitable grade of activated carbon.