PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, AND MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT

A piezoelectric element includes: a vibration unit that outputs a pressure detection signal according to a pressure; a support member; and an improvement unit for improving a detection accuracy of the pressure detection signal. The vibration unit on the support member includes a piezoelectric film a...

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Bibliographische Detailangaben
Hauptverfasser:	Sakai, Minekazu, Koyama, Yuuji, Mawatari, Kazuaki
Format:	Patent
Sprache:	eng
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS PUBLIC ADDRESS SYSTEMS
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Beschreibung
Zusammenfassung:	A piezoelectric element includes: a vibration unit that outputs a pressure detection signal according to a pressure; a support member; and an improvement unit for improving a detection accuracy of the pressure detection signal. The vibration unit on the support member includes a piezoelectric film and an electrode film in a support region and vibration regions. Each vibration region has one end portion as a fixed end and an other end portion as a free end. A part of each vibration region on a one end portion side is a first region, and another part of each vibration region on an other end portion side is a second region. The electrode film is disposed in the first region.