ELECTRON BEAM WRITING APPARATUS AND CATHODE LIFE SPAN PREDICTION METHOD

ELECTRON BEAM WRITING APPARATUS AND CATHODE LIFE SPAN PREDICTION METHOD

An electron beam writing apparatus comprising, a cathode configured to emit an electron beam, a condition controller configured to change a condition under which the electron beam is emitted from the cathode in a plurality of ways, and a prediction unit configured to predict a life span of the catho...

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Bibliographische Detailangaben
Hauptverfasser: NAKAHASHI, Satoshi, NAKAYAMA, Takahito, MIYAMOTO, Nobuo, SHINKAWA, Shunji
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:An electron beam writing apparatus comprising, a cathode configured to emit an electron beam, a condition controller configured to change a condition under which the electron beam is emitted from the cathode in a plurality of ways, and a prediction unit configured to predict a life span of the cathode based on a temporal change in an amount of fluctuation of a beam characteristic of the electron beam to a change in the condition when the condition is changed.