LAMINATE AND METHOD FOR PRODUCING SAME

A laminate including a metallic base material, a first nickel-containing plating film layer formed on the metallic base material, a gold plating film layer formed on the first nickel-containing plating film layer, a second nickel-containing plating film layer formed on the gold plating film layer, a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KOJIMA, Tadaaki, NAKA, Fumiaki, FURUYA, Akira, SUZUKI, Hiroshi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A laminate including a metallic base material, a first nickel-containing plating film layer formed on the metallic base material, a gold plating film layer formed on the first nickel-containing plating film layer, a second nickel-containing plating film layer formed on the gold plating film layer, and a nickel fluoride film layer formed on the second nickel-containing plating film layer. Also disclosed is a method for producing the laminate as well as a constituent member of a semiconductor production device including the laminate.