Mirror Device for an Interferometer Device, Interferometer Device and Method for Producing a Mirror Device

The disclosure relates to a mirror device for an interferometer device including a first mirror layer and a second mirror layer, which are arranged in parallel on top of one another and spaced apart from one another by a mirror layer spacing. The mirror layer spacing forms an intermediate space betw...

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Bibliographische Detailangaben
Hauptverfasser:	Kraemmer, Christoph Daniel, Roedel, Reinhold, Schelling, Christoph
Format:	Patent
Sprache:	eng
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	The disclosure relates to a mirror device for an interferometer device including a first mirror layer and a second mirror layer, which are arranged in parallel on top of one another and spaced apart from one another by a mirror layer spacing. The mirror layer spacing forms an intermediate space between the first and the second mirror layer. The intermediate space includes a gas or a vacuum, and at least one spacing structure which extends at least partially between the first and the second mirror layer. The spacing structure has a material that is the same as or different from the first and/or second mirror layer.