OBJECT POSITIONER, METHOD FOR CORRECTING THE SHAPE OF AN OBJECT, LITHOGRAPHIC APPARATUS, OBJECT INSPECTION APPARATUS, DEVICE MANUFACTURING METHOD

The invention provides an object positioner comprising:-an object support having an object support surface which is configured to engage at least a part of an object, said object support surface having a support surface temperature,-a thermal device, which thermal device is configured to provide at...

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Bibliographische Detailangaben
Hauptverfasser:	VOZNYI, Oleg Viacheslavovich, FRENCKEN, Mark Johannes Hermanus, NAGTEGAAL, Theodorus Marcus
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	The invention provides an object positioner comprising:-an object support having an object support surface which is configured to engage at least a part of an object, said object support surface having a support surface temperature,-a thermal device, which thermal device is configured to provide at least a part of the object with a first object temperature, which first object temperature differs from the support surface temperature by a first predetermined temperature difference.