DIAPHRAGM AND FLUID DEVICE
A diaphragm 30 includes a fixed portion 32 to be fixed to a body portion 10, and a flexible thin film portion 33 integrally connected to the fixed portion 32. The fixed portion 32 has a tubular press-fitting portion 34 to be press-fitted into a tubular sealing groove 15 formed on the body portion 10...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A diaphragm 30 includes a fixed portion 32 to be fixed to a body portion 10, and a flexible thin film portion 33 integrally connected to the fixed portion 32. The fixed portion 32 has a tubular press-fitting portion 34 to be press-fitted into a tubular sealing groove 15 formed on the body portion 10, and a diaphragm-side tapered surface 38 formed on an axis C side with respect to the press-fitting portion 34. In a state where the press-fitting portion 34 is press-fitted into the sealing groove 15, an inclination angle θ1 of the diaphragm-side tapered surface 38 relative to the axis C is smaller than an inclination angle θ2 of a body-side tapered surface 18 formed on the body portion 10 relative to the axis C, and an end portion 38a of the diaphragm-side tapered surface 38 is brought into contact with the body-side tapered surface 18. |
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