LASER CRYSTALLIZATION APPARATUS

A laser crystallization apparatus according to an embodiment includes a light source unit irradiating a laser beam; and an optical unit to which the laser beam is incident, wherein the optical unit includes a first portion and a second portion bonded to each other on a bonded surface, and a first wi...

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Bibliographische Detailangaben
Hauptverfasser: Sangu, Akifumi, Lee, Hae Sook, Chae, Young Su, Park, Cheol Ho, Jeun, Jin Hong, Ryu, Je Kil, Han, Gyoo Wan
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A laser crystallization apparatus according to an embodiment includes a light source unit irradiating a laser beam; and an optical unit to which the laser beam is incident, wherein the optical unit includes a first portion and a second portion bonded to each other on a bonded surface, and a first width of the first portion and a second width of the second portion are the same as each other on the bonded surface based on a direction parallel to the incident direction of the laser beam.