CHARGED PARTICLE MICROSCOPE SYSTEMS AND CLUSTERING PROCESSES FOR HIGH DYNAMIC RANGE SAMPLE ANALYSIS

Methods and systems for high dynamic range (HDR) charged particle analysis using clustering processes include accessing a plurality of instances of image data for a region of a sample, where each instance of image data was captured with different parameters by a charged particle microscope. The difference in parameters may include one or more of a difference in contrast, brightness, beam strength, beam type, gamma, and/or a combination thereof. An HDR charged particle microscopy data structure is then generated using the captured image data, and one or more features of the sample are identified based on the HDR charged particle microscopy data structure. In some methods according to the present invention, the methods further include performing EDS analysis on the sample based on the determined one or more identified features.