OPTICAL DISTANCE MEASUREMENT DEVICE AND MACHINING DEVICE
A first optical path length from an emission surface of a first optical system to a reflection surface of a target object is calculated on the basis of first reflected light received by the first optical system and reference light generated by a splitter. A second optical path length from an emissio...
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Zusammenfassung: | A first optical path length from an emission surface of a first optical system to a reflection surface of a target object is calculated on the basis of first reflected light received by the first optical system and reference light generated by a splitter. A second optical path length from an emission surface of the second optical system to a reflection surface of a reflector is calculated on the basis of second reflected light reflected by the reflector and received by the second optical system and the reference light generated by the splitter A refractive index of a space is calculated on the basis of the second optical path length, and a distance from the emission surface of the first optical system to the reflection surface of the target object is calculated on the basis of the refractive index and the first optical path length. |
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