APPARATUS AND PROCESS FOR DETERMINING THE DISTANCE BETWEEN A GLASS SUBSTRATE AND A COATER

A combination of a chemical vapour deposition (CVD) coater and at least one capacitive proximity sensor, comprising: a CVD coater, and at least one capacitive proximity sensor attached to the CVD coater, wherein the at least one capacitive proximity sensor is arranged to determine the distance betwe...

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Bibliographische Detailangaben
Hauptverfasser: WILLIAMS, IAN ROSS, DAY, STEPHEN ROLAND, HARRIS, PETER MICHAEL, EVANS, DAVID, RIMMER, DAVID
Format: Patent
Sprache:eng
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Zusammenfassung:A combination of a chemical vapour deposition (CVD) coater and at least one capacitive proximity sensor, comprising: a CVD coater, and at least one capacitive proximity sensor attached to the CVD coater, wherein the at least one capacitive proximity sensor is arranged to determine the distance between a glass substrate and the CVD coater.