INTEGRATED STRUCTURE OF CRYSTAL RESONATOR AND CONTROL CIRCUIT AND INTEGRATION METHOD THEREFOR

A structure and method for integrating a crystal resonator with a control circuit are disclosed. The integration is accomplished by bonding a substrate containing an upper cavity to a device wafer containing both the control circuit and a lower cavity so that a piezoelectric vibrator is sandwiched between the device wafer and the substrate. An increased degree of integration of the crystal resonator and on-chip modulation of its parameters can be achieved by further bonding a semiconductor die to the device wafer. Compared to traditional ones, in addition to being able to integrate with other semiconductor components more easily with a higher degree of integration, the crystal resonator of the present invention is more compact in size and hence less power-consuming.