INSPECTION APPARATUS AND INSPECTION METHOD FOR ELECTRONIC DEVICE

An inspection apparatus for an electronic device is provided. The electronic device includes a substrate and an electrode located on the substrate. The inspection apparatus includes a support to support the electronic device, a probe to be brought into contact with a surface of the electrode, a temp...

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Bibliographische Detailangaben
1. Verfasser:	HIRANO, Mitsuharu
Format:	Patent
Sprache:	eng
Schlagworte:	COLORIMETRY ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	An inspection apparatus for an electronic device is provided. The electronic device includes a substrate and an electrode located on the substrate. The inspection apparatus includes a support to support the electronic device, a probe to be brought into contact with a surface of the electrode, a temperature adjusting device configured to adjust at least one of a temperature of the surface of the electrode and a temperature of the probe such that the temperature of the surface of the electrode and the temperature of the probe are different from each other, and a temperature measuring device configured to measure the temperature of the surface of the electrode.