LAYERED STRUCTURE, PIEZOELECTRIC DEVICE USING THE SAME, AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE

LAYERED STRUCTURE, PIEZOELECTRIC DEVICE USING THE SAME, AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE

The occurrence of cracking in a functional layer is suppressed, while maintaining flexibility of a layered structure. The layered structure includes a polymer substrate, and a crystalline functional layer formed on the first surface of the substrate. The surface roughness of the first surface of the...

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Hauptverfasser: NAGAOKA, Naoki, ISHIKAWA, Taketo, NAKAMURA, Daisuke, MACHINAGA, Hironobu, KUROSE, Manami
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ELECTRICITY
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creator NAGAOKA, Naoki
ISHIKAWA, Taketo
NAKAMURA, Daisuke
MACHINAGA, Hironobu
KUROSE, Manami
description The occurrence of cracking in a functional layer is suppressed, while maintaining flexibility of a layered structure. The layered structure includes a polymer substrate, and a crystalline functional layer formed on the first surface of the substrate. The surface roughness of the first surface of the substrate is 3 nm or less in terms of arithmetic mean roughness (Ra).
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title LAYERED STRUCTURE, PIEZOELECTRIC DEVICE USING THE SAME, AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE
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