LAYERED STRUCTURE, PIEZOELECTRIC DEVICE USING THE SAME, AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE

LAYERED STRUCTURE, PIEZOELECTRIC DEVICE USING THE SAME, AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE

The occurrence of cracking in a functional layer is suppressed, while maintaining flexibility of a layered structure. The layered structure includes a polymer substrate, and a crystalline functional layer formed on the first surface of the substrate. The surface roughness of the first surface of the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAGAOKA, Naoki, ISHIKAWA, Taketo, NAKAMURA, Daisuke, MACHINAGA, Hironobu, KUROSE, Manami
Format: Patent
Sprache:eng
Schlagworte:
ELECTRICITY
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Beschreibung
Zusammenfassung:The occurrence of cracking in a functional layer is suppressed, while maintaining flexibility of a layered structure. The layered structure includes a polymer substrate, and a crystalline functional layer formed on the first surface of the substrate. The surface roughness of the first surface of the substrate is 3 nm or less in terms of arithmetic mean roughness (Ra).