PURE WATER MANUFACTURING MANAGEMENT SYSTEM AND PURE WATER MANUFACTURING MANAGEMENT METHOD

The pure water manufacturing management system includes a pure water manufacturing device; an analysis device that inspects water quality; a first valve provided to first piping connected to the outlet side of the manufacturing device, the first valve controlling the amount of pure water supplied to...

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Bibliographische Detailangaben
Hauptverfasser: CHIYOMARU, Masaru, MIKAWA, Hiroaki, OKUZAKI, Yuichi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The pure water manufacturing management system includes a pure water manufacturing device; an analysis device that inspects water quality; a first valve provided to first piping connected to the outlet side of the manufacturing device, the first valve controlling the amount of pure water supplied to a storage tank; second piping that branches from the first piping and is connected to the analysis device; and a control device, the control device controlling the analysis device during supply of the pure water to the storage tank, repeatedly performing water quality inspection of the pure water flowing in through the second piping, opening the first valve when, as a result of the water quality inspection, the water quality of the pure water satisfies a prescribed standard, and closing the first valve when the water quality of the pure water does not satisfy the prescribed standard.