MICROSCALE AND NANOSCALE STRUCTURED ELECTROMECHANICAL TRANSDUCERS EMPLOYING COMPLIANT DIELECTRIC SPACERS

Described embodiments provide an electromechanical transducer including a mechanically compliant, elastically deformable array of dielectric shells. A first electrically conductive electrode is disposed on a first surface of the array. A second electrically conductive electrode is disposed on a seco...

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Bibliographische Detailangaben
Hauptverfasser: HAN, Jinchi, LANG, Jeffrey H, BULOVIC, Vladimir, REARDON, Damien, MURARKA, Apoorva
Format: Patent
Sprache:eng
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Zusammenfassung:Described embodiments provide an electromechanical transducer including a mechanically compliant, elastically deformable array of dielectric shells. A first electrically conductive electrode is disposed on a first surface of the array. A second electrically conductive electrode is disposed on a second surface of the array, where the second surface opposes the first surface. The array is configured to be mechanically compliant and elastically deformable in response to one or more incident forces applied to the electromechanical transducer.