POD CLEANING DEVICE

Proposed is A POD cleaning apparatus including: a separate unit separating a POD introduced through an introducing inlet; a first transportation unit transporting a separation POD resulting from the separation in the separation unit; a plurality of cleaning chambers in each of which the separation P...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUR, Dong Geun, PARK, Young Soo, LEE, Ki Man
Format: Patent
Sprache:eng
Schlagworte:
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