POD CLEANING DEVICE

Proposed is A POD cleaning apparatus including: a separate unit separating a POD introduced through an introducing inlet; a first transportation unit transporting a separation POD resulting from the separation in the separation unit; a plurality of cleaning chambers in each of which the separation P...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HUR, Dong Geun, PARK, Young Soo, LEE, Ki Man
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BLASTING CINEMATOGRAPHY CLEANING CLEANING IN GENERAL DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ELECTROGRAPHY HEATING HOLOGRAPHY LIGHTING MATERIALS THEREFOR MECHANICAL ENGINEERING ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PREVENTION OF FOULING IN GENERAL TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	Proposed is A POD cleaning apparatus including: a separate unit separating a POD introduced through an introducing inlet; a first transportation unit transporting a separation POD resulting from the separation in the separation unit; a plurality of cleaning chambers in each of which the separation POD transported by the first transportation unit is cleaned and dried; a chamber in which the separation POD dried in the cleaning chamber is vacuum-processed; a second transportation transporting the separation dried in the cleaning chamber to the vacuum chamber; and an assembly unit assembling the vacuum-processed separation PODs, in which each of the plurality of cleaning chambers includes: a cleaning sub-chamber where the separation POD transported by the first transportation unit is accommodated and cleaned; and a drying chamber where the separation POD transported from the cleaning sub-chamber is dried, and in which the cleaning sub-chamber and the drying chamber are spatially separated.