STAGE STRUCTURE FOR SEMICONDUCTOR FABRICATION PROCESS, SYSTEM OF PICKING UP SEMICONDUCTOR CHIP, AND METHOD OF CONTROLLING TILTING ANGLE OF PICKUP HEAD

STAGE STRUCTURE FOR SEMICONDUCTOR FABRICATION PROCESS, SYSTEM OF PICKING UP SEMICONDUCTOR CHIP, AND METHOD OF CONTROLLING TILTING ANGLE OF PICKUP HEAD

A stage structure for a semiconductor fabrication process is disclosed. The stage structure may include a stage and a pickup head tilting control device. The pickup head tilting control device may include a correction plate, a tilting driving device which is coupled to the correction plate and is co...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: JUNG, Jin-San, LIM, Jun-Su, CHOI, Hyunseok
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A stage structure for a semiconductor fabrication process is disclosed. The stage structure may include a stage and a pickup head tilting control device. The pickup head tilting control device may include a correction plate, a tilting driving device which is coupled to the correction plate and is configured to adjust an inclination angle of the correction plate, and a control circuitry configured to control the tilting driving device. The correction plate may include a correction surface which is selectively in contact with a suction surface of a pickup head.