RADIATION SENSOR AND MANUFACTURING METHOD FOR SAME

RADIATION SENSOR AND MANUFACTURING METHOD FOR SAME

A radiation sensor has a substrate, a radiation sensitive chip thereon, a radiation impermeable frame joined to the chip side surfaces and surrounding the chip, and a radiation permeable layer over the chip. The frame does not project or does not substantially project over the upper edge of the chip...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: GEBAUER, Christoph, GOTTLOB, Heinrich, SCHMIDT, Manuel
Format: Patent
Sprache:eng
Schlagworte:
MEASUREMENT OF NUCLEAR OR X-RADIATION
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A radiation sensor has a substrate, a radiation sensitive chip thereon, a radiation impermeable frame joined to the chip side surfaces and surrounding the chip, and a radiation permeable layer over the chip. The frame does not project or does not substantially project over the upper edge of the chip along a substantial part of its inner periphery. The radiation permeable layer value projects over the chip in the lateral direction and is on the frame or above it.