GAS PURIFYING APPARATUS, GAS PURIFYING METHOD AND CONVEYING HEATING APPARATUS
A gas purifying apparatus has: a compressing unit for compressing a gas in which an atmosphere or inert gas and a substance vaporized by heating have been mixed; and an expanding unit for liquefying the substance by expanding the gas compressed by the compressing unit, wherein the gas in which the s...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A gas purifying apparatus has: a compressing unit for compressing a gas in which an atmosphere or inert gas and a substance vaporized by heating have been mixed; and an expanding unit for liquefying the substance by expanding the gas compressed by the compressing unit, wherein the gas in which the substance has been reduced is obtained |
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