GAS PURIFYING APPARATUS, GAS PURIFYING METHOD AND CONVEYING HEATING APPARATUS

A gas purifying apparatus has: a compressing unit for compressing a gas in which an atmosphere or inert gas and a substance vaporized by heating have been mixed; and an expanding unit for liquefying the substance by expanding the gas compressed by the compressing unit, wherein the gas in which the s...

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Bibliographische Detailangaben
Hauptverfasser: SAITO, Shoichi, SHIDA, Atsushi, KIMOTO, Hisashi, UCHIDA, Nobuo
Format: Patent
Sprache:eng
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Zusammenfassung:A gas purifying apparatus has: a compressing unit for compressing a gas in which an atmosphere or inert gas and a substance vaporized by heating have been mixed; and an expanding unit for liquefying the substance by expanding the gas compressed by the compressing unit, wherein the gas in which the substance has been reduced is obtained