SEMICONDUCTOR MATERIALS AND DEVICES INCLUDING III-NITRIDE LAYERS INTEGRATED WITH SCANDIUM ALUMINUM NITRIDE

SEMICONDUCTOR MATERIALS AND DEVICES INCLUDING III-NITRIDE LAYERS INTEGRATED WITH SCANDIUM ALUMINUM NITRIDE

A ScxAl1-xN based filter may include a ScxAl1-xN material formed directly on a III-N material. The III-N material may include an n-type III-N layer or a III-N heterostructure having a 2DEG therein. The ScxAl1-xN based filter may be monolithically integrated with a III-N device such as a HEMT device...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Arkun, Fevzi, Sharifi, Hasan, Whiteley, Samuel
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A ScxAl1-xN based filter may include a ScxAl1-xN material formed directly on a III-N material. The III-N material may include an n-type III-N layer or a III-N heterostructure having a 2DEG therein. The ScxAl1-xN based filter may be monolithically integrated with a III-N device such as a HEMT device to form a monolithically integrated circuit.