INSPECTION APPARATUS, INSPECTION SYSTEM, AND INSPECTION METHOD

An inspection apparatus includes a projector to irradiate an inspection target with light according to pattern image data associated with the inspection target, and an imaging device to capture an image of the inspection target being irradiated with the light from the projector and output image data...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KISHI, Hidenobu, HINO, Makoto
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An inspection apparatus includes a projector to irradiate an inspection target with light according to pattern image data associated with the inspection target, and an imaging device to capture an image of the inspection target being irradiated with the light from the projector and output image data of the captured image. The pattern image data specifies a pattern of light irradiation of the inspection target.