PIEZOELECTRIC ELEMENT, METHOD OF MANUFACTURING THE SAME, SURFACE ACOUSTIC WAVE ELEMENT, AND PIEZOELECTRIC THIN FILM RESONANCE ELEMENT

A piezoelectric element includes a single crystal piezoelectric film, wherein the single crystal piezoelectric film includes an aluminum nitride film and wherein a full width at half maximum at (002) diffraction peak of the aluminum nitride film is smaller than 1.00 degree.

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Bibliographische Detailangaben
Hauptverfasser: ITO, Norikazu, SHIMOJI, Noriyuki, DATE, Tomohiro
Format: Patent
Sprache:eng
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Zusammenfassung:A piezoelectric element includes a single crystal piezoelectric film, wherein the single crystal piezoelectric film includes an aluminum nitride film and wherein a full width at half maximum at (002) diffraction peak of the aluminum nitride film is smaller than 1.00 degree.