MOVABLE ELECTRODE FOR PROCESS CHAMBER

MOVABLE ELECTRODE FOR PROCESS CHAMBER

A process chamber is provided including a chamber body enclosing an inner volume; a substrate support disposed in the inner volume; an electrode disposed above the substrate support; and an actuator configured to move the electrode in the process chamber to change a distance between the electrode an...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: KUSTRA, Rick
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A process chamber is provided including a chamber body enclosing an inner volume; a substrate support disposed in the inner volume; an electrode disposed above the substrate support; and an actuator configured to move the electrode in the process chamber to change a distance between the electrode and the substrate support.