SENSOR COMPONENT INCLUDING A MICROELECTROMECHANICAL Z INERTIAL SENSOR AND METHOD FOR ASCERTAINING AN ACCELERATION WITH THE AID OF THE MICROELECTROMECHANICAL Z INERTIAL SENSOR

A sensor component. The sensor component includes a microelectromechanical z inertial sensor, including two sensor elements situated on a substrate and each designed in the form of a z rocker. The sensor elements each includes a seismic mass structure, elastically deflectable with respect to the sub...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Rambach, Martin
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING
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