SENSOR COMPONENT INCLUDING A MICROELECTROMECHANICAL Z INERTIAL SENSOR AND METHOD FOR ASCERTAINING AN ACCELERATION WITH THE AID OF THE MICROELECTROMECHANICAL Z INERTIAL SENSOR

A sensor component. The sensor component includes a microelectromechanical z inertial sensor, including two sensor elements situated on a substrate and each designed in the form of a z rocker. The sensor elements each includes a seismic mass structure, elastically deflectable with respect to the sub...

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1. Verfasser: Rambach, Martin
Format: Patent
Sprache:eng
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Zusammenfassung:A sensor component. The sensor component includes a microelectromechanical z inertial sensor, including two sensor elements situated on a substrate and each designed in the form of a z rocker. The sensor elements each includes a seismic mass structure, elastically deflectable with respect to the substrate with the aid of a torsion spring, which has a heavy side and an oppositely situated light side with regard to the torsion springs. The seismic mass structure of the two sensor elements have different perforations on its heavy and/or light side(s), which effectuate a different sensitivity of the two sensor elements to a temperature gradient running in the z direction. The sensor component also includes an evaluation circuit designed to ascertain an acceleration in the z direction by evaluating the deflection of the seismic mass structure of the two sensor elements.