INFORMATION PROCESSING APPARATUS, LEARNING DEVICE, INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, AND NON-TRANSITORY STORAGE MEDIUM

An information processing apparatus including a calculator configured to calculate orientation information based on a Talbot image of a sample, a structure analyzer configured to perform structural analysis of the sample based on the calculated orientation information, and an output configured to ou...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: EGUCHI, Yoshihiko, OTA, Ikuma
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:An information processing apparatus including a calculator configured to calculate orientation information based on a Talbot image of a sample, a structure analyzer configured to perform structural analysis of the sample based on the calculated orientation information, and an output configured to output a result of the structural analysis. The information processing apparatus may further include a learning device configured to perform part of a process of structural analysis using machine learning. The learning device may include a first learning unit that undergoes learning by associating sample manufacture information of samples with Talbot images. The learning device may include a second learning unit that undergoes learning by associating sample manufacture information of samples with a set of orientation information.