SEMICONDUCTOR STORAGE DEVICE

A semiconductor storage device includes a first conductive layer; a first insulating layer between the first and second conductive layers; a second insulating layer between the first conductive layer and the first insulating layer; a third insulating layer between the second conductive layer and the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHIMADA, Yusuke, NAGASHIMA, Satoshi, CAI, Weili, ISHIKAWA, Takayuki, NARASAKI, Ryota, HAN, Yefei
Format: Patent
Sprache:eng
Schlagworte:
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