PHASE SHIFT DEVICE INCLUDING METAL-DIELECTRIC COMPOSITE STRUCTURE

Provided in a phase shifting device including a plurality of metal layers and a plurality of first dielectric layers, a metal layer of the plurality of metal layers and a first dielectric layer of the plurality of first dielectric layers being alternately stacked in a first direction, and a second d...

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Bibliographische Detailangaben
Hauptverfasser: KIM, Jaekwan, SHIN, Jonghwa, YANG, Kiyeon, KIM, Reehyang, HAN, Narae, KIM, Yongsung, LEE, Jeongyub, LEE, Changseung
Format: Patent
Sprache:eng
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Zusammenfassung:Provided in a phase shifting device including a plurality of metal layers and a plurality of first dielectric layers, a metal layer of the plurality of metal layers and a first dielectric layer of the plurality of first dielectric layers being alternately stacked in a first direction, and a second dielectric layer disposed on a side surface of the stacked structure in a second direction, wherein the first dielectric layer includes a first material having a first dielectric constant and the second dielectric layer includes a second material having a second dielectric constant, and wherein the second dielectric constant is greater than the first dielectric constant.