SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME

A semiconductor memory device includes a static random access memory (SRAM) cell that is provided on a substrate and includes a pass-gate transistor, a pull-down transistor, and a pull-up transistor. Each of the pass-gate transistor, the pull-down transistor, and the pull-up transistor includes an a...

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Bibliographische Detailangaben
Hauptverfasser: LEE, HOJOON, SHIN, HEESUNG, HONG, CHANG-MIN, JUNG, YOUNGHUN, HONG, HEE BUM
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor memory device includes a static random access memory (SRAM) cell that is provided on a substrate and includes a pass-gate transistor, a pull-down transistor, and a pull-up transistor. Each of the pass-gate transistor, the pull-down transistor, and the pull-up transistor includes an active fin protruding above a device isolation layer, a gate electrode on the active fin, and a gate insulating layer between the active fin and the gate electrode. The gate insulating layer of the pull-down transistor includes a first dipole element. The highest concentration of the first dipole element of the gate insulating layer of the pull-down transistor is higher than the highest concentration of the first dipole element of the gate insulating layer of the pass-gate transistor.