CASCADABLE MEMS LOGIC DEVICE BASED ON MODES ACTIVATION

A cascadable resonator logic system includes a substrate; a first straight beam anchored with a first end to the substrate; a second straight beam anchored with a first end to the substrate; a first arch beam, which is curved, and is attached with a first end to a second end of the first straight be...

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Bibliographische Detailangaben
Hauptverfasser: TELLA, Sherif Adekunle, YOUNIS, Mohammad Ibrahim
Format: Patent
Sprache:eng
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